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Single-Photon and Two-Photon Photopolymerization for Micro-Nano Fabrication

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Abstract

Photopolymerizable resin is lately one of the most attractive materials for manufacturing optical microdevices and complex three-dimensional(3D) structures. We have been studying the photofabrication of 3D micro-nano structures with photopolymerizable resin for micro-nano photonic devices and micro-electromechanical systems(MEMS). In this presentation, I will show several photopolymerization processes and micro-nano fabrication methods based on single-photon and two-photon absorptions.

© 2002 Optical Society of America

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