Abstract
Photopolymerizable resin is lately one of the most attractive materials for manufacturing optical microdevices and complex three-dimensional(3D) structures. We have been studying the photofabrication of 3D micro-nano structures with photopolymerizable resin for micro-nano photonic devices and micro-electromechanical systems(MEMS). In this presentation, I will show several photopolymerization processes and micro-nano fabrication methods based on single-photon and two-photon absorptions.
© 2002 Optical Society of America
PDF ArticleMore Like This
Ying-Ja Chen, Yi-Chun Chen, Chau-Hwang Lee, and Jyhpyng Wang
CTuN1 Conference on Lasers and Electro-Optics (CLEO:S&I) 2002
Satoshi Kawata
TuB1_4 Conference on Lasers and Electro-Optics/Pacific Rim (CLEO/PR) 2001
J. Serbin, C. Fallnich, and B.N. Chichkov
TuE39 International Conference on Ultrafast Phenomena (UP) 2002