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Multiphoton EUV photonics: Demonstration of quasi phase matching at short wavelengths

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Abstract

We present the first demonstration of quasi-phase-matched frequency conversion of laser light into the extreme-ultraviolet (EUV) region of the spectrum. Using a modulated hollow-core waveguide to periodically vary the intensity of the light driving the conversion process, we efficiently generate EUV light even in the presence of substantial ionization of the gas that would otherwise prevent buildup of the signal. This results in efficient generation of substantially higher harmonic photon energies than are otherwise possible. The periodic structure modulates the generation of high harmonics and restricts HHG to regions with favorable constructive interference. We also show that under the correct conditions the periodic structure may allow for the generation of isolated attosecond pulses, using easily-obtainable driving pulses of ~25 fs duration. This work overcomes a critical challenge in implementing useful coherent EUV sources at wavelengths of interest to advanced lithography, and for high-resolution imaging applications.

© 2002 Optical Society of America

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