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Conferences > NLO > 2021 > NM2A > NM2A.7

Nonlinear optical characterization of deuterated silicon-rich nitride waveguides

X. X. Chia, G. F. R. Chen, Y. M. Cao, D. K. T. Ng, P. Xing, and D. T. H. Tan

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Abstract

Nonlinear optical characterization of Silicon-Rich Nitride waveguides fabricated using deuterated silane are presented. Fourier Transform Infrared Spectroscopy reveals the absence of Si-H and N-H related bonds known to cause optical absorption close to a wavelength of 1550nm.

© 2021 The Author(s)

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