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Conferences > NLO > 2023 > M3B > M3B.7

OH absorption in on-chip high-Q resonators

Lue Wu, Maodong Gao, Jin-Yu Liu, Hao-Jing Chen, Kellan Colburn, Henry A. Blauvelt, and Kerry J. Vahala

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Abstract

The hydroxyl ion (OH) content in thermal-grown silica high-Q resonators is estimated to be 2.4 ppm (weight) by SIMS and Q-measurement. Record high optical Q factors for on-chip microresonators are measured from 685nm – 1064nm.

© 2023 The Author(s)

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