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Laser Damage Resistant Ta2O5/HfO2/SiO2 Multilayer Mirrors by Ion Beam Sputtering

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Abstract

We show the threshold fluence for damage of Ta2O5/SiO2 multilayer interference coatings measured using 0.19 ns and 4 ns pulses with λ=1.03 µm can be increased by 2x when modifying the coating’s top layer design.

© 2015 Optical Society of America

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