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Conferences > NOMA > 2016 > NoM4C > NoM4C.3

Characterization of Glancing-Angle–Deposited Magnesium Oxide Films

J. B. Oliver, C. Smith, B. Taylor, J. Spaulding, S. MacNally, and T. Shea

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Abstract

Glancing-angle–deposited MgO films are characterized using ellipsometry, scanning-electron microscopy, 351-nm photometry, and retardance mapping. Development of a quantitative model remains a challenge, with progress and empirical results reported.

© 2016 Optical Society of America

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