Abstract

Hard disk, mechanical simulations of film growth date back to Henderson et al.¹ and Dirks and Leamy² and were successful in predicting the tangent rule of columnar orientation in conditions of limited mobility, that is, relaxation of the adatoms to the nearest stable position. In the simple model, packing density is lower than normal films but a scheme of increased mobility gives higher, more realistic values. With higher mobility the tangent rule no longer necessarily holds good, but this is in accordance with measurement.

© 1985 Optical Society of America