Abstract

Multilayer reflectors for short wavelengths, such as the soft x-ray region, have been fabricated using materials such as tungsten and carbon.^1-3 More recently, a normal incidence reflector at 170 Å was fabricated by Barbee using molybdenum and silicon.⁴ The normal incidence reflectors described in this work were designed to operate in the EUV. The choice of materials for this effort will be discussed. We analyzed these coatings using Auger depth profiling to determine whether the correct profile was obtained. We also measured the total physical thickness of the coatings on a witness sample. The reflectance of the coatings was measured vs angle of incidence. One of our conclusions is that Auger depth profiling of layers as thin as the ones in this study can be misleading if the ion-etch rates of the two thin-film materials are significantly different. The data and conclusions from these measurements are presented.

© 1985 Optical Society of America