Abstract

An ultrahigh vacuum reflectometer has been built for the Naval Research Laboratory beamline at the National Synchrotron Light Source at Brookhaven National Laboratory. This beamline contains the grating/crystal monochromator¹ that has a wavelength range of 2000-5 Å. The combination of these facilities permits reflectometry over a very wide spectral range for studies of optical constants, reflectance measurements of multilayer coatings, scattering, and simple diffraction grating efficiency measurements. The samples can be rotated about their normals to allow measurements on anisotropic samples at different orientations of a selected surface direction with respect to the polarized radiation. The detector rotates around the sample center in the plane of incidence for specular and in-plane scattering measurements. In addition, its altitude can be changed with respect to the incidence plane so that out-of-plane measurements can also be made. A variety of detectors can be used and the detector mount can accommodate more than one detector at a time if desired. An ultrahigh vacuum sample preparation and transfer station is under construction so that atomically clean surfaces can be prepared and a number of samples can be measured in succession without venting the reflectometer to air.

© 1985 Optical Society of America