Abstract
Zone plates with outermost zone width ≥300 Å have been fabricated by high-resolution E-beam writing in carbon contamination resist. The replication of a range of such zone plates into gold has been successful. The zone plates have been tested in scanning x-ray microscopes using synchrotron radiation at both Brookhaven and Daresbury, U.K. The latter microscope is a new development with a scanning stage having a fine step size of 100 Å. The design and performance of the new scanning microscope are discussed, as are the practical problems of zone plate fabrication and scanning x-ray microscopy as the point-to-point resolution improves. The further development of soft x-ray imaging is considerably aided by theoretical considerations of the optical properties of diffracting elements incorporating the 3-D structure, i.e., including the effect of the zone plate thickness. An integral formulation we have developed for this thick slit problem makes use of the circular zone-plate symmetry and also provides a possible route toward the solution of the inverse problem in zone plate design.
© 1986 Optical Society of America
PDF ArticleMore Like This
Y. Vladimirsky, D. Attwood, D. Kern, and T. H. P. Chang
MS3 OSA Annual Meeting (FIO) 1986
C.J. Buckley, R. Feder, and M.T. Browne
WB3 Short Wavelength Coherent Radiation: Generation and Applications (HFSW) 1986
H. Ade, J. Kirz, R. Rosser, Y. Vladimirsky, D. Kern, and H. Rarback
MS4 OSA Annual Meeting (FIO) 1986