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Surface roughness measurement by angular scattering of a laser beam

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Abstract

There are two types of scattering theory, scalar and vector. Separately based on scalar diffraction theory and on vector perturbation theory, the theory models of light intensity distribution of laser beam scattering from a slightly rough surface are built and the expressions for the height, slope, and wavelength covariances of surface roughness are derived.

© 1986 Optical Society of America

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