Z-80 based system for controlled deposition of tapered metal films

Paul G. Suchoski; R. V. Ramaswamy

doi:10.1364/OAM.1986.WG16

Annual Meeting Optical Society of America
Technical Digest Series (Optica Publishing Group, 1986),
paper WG16
•https://doi.org/10.1364/OAM.1986.WG16

Z-80 based system for controlled deposition of tapered metal films

Paul G. Suchoski and R. V. Ramaswamy

OSA Annual Meeting 1986

Seattle, Washington United States
19–25 October 1986
ISBN:

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Poster Session (WG)

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P. G. Suchoski and R. V. Ramaswamy, "Z-80 based system for controlled deposition of tapered metal films," in Annual Meeting Optical Society of America, Technical Digest Series (Optica Publishing Group, 1986), paper WG16.

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Abstract

In the past, tapered films have been obtained by shadow masking during deposition. There are two problems with this approach: (i) repeatability and (ii) only limited taper functions are possible. We present an alternative method in which the tapered film is obtained by driving a knife-edge across the sample during deposition using a computer-controlled stepping motor-driven translation stage.

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