Abstract

A scalar scattering model for multilayer optical coatings is described that predicts the angular distribution of scattered light within 35° of the specular beam for incidence angles of <35°. The model predicts the scattering from coatings with uncorrelated roughness, additive roughness, or uncorrelated index variations. The scattering model treats a rough or inhomogeneous coating as a thin screen with random amplitude and phase variations. The amplitude and phase variations are related to the design of the coating and to the first- and second-order statistics of the roughness or index inhomogeneities.

© 1987 Optical Society of America