Abstract

A model for light scattering spectra from double layers with uncorrelated roughness is discussed. The model is based on Fresnel multilayer calculations with amplitude reflection coefficients reduced according to the scalar scattering theory and uses the normalized electric field intensity to scale the resulting interface scattering.¹ It is demonstrated that the effect of uncorrelated roughness at the two interfaces is to change the electric field pattern in a way which enhances the scattering at wavelengths where the specular interference pattern has a minimum and vice versa. The rms roughness values are considered as parameters and have been used to fit the calculated results to experimental spectra. For the particular case of oxidized copper, which exhibits high scattering levels, the parameters thus obtained show good agreement with roughness values obtained by other techniques.² In particular we emphasize the importance of using spectral variation to extract information from scattering measurements on this kind of system.

© 1989 Optical Society of America