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Design and performance of layered synthetic microstructures on diffraction gratings in the VUV

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Abstract

The success of layered synthetic microstructures (LSM) as reflectance enhancing coatings for mirrors at wavelengths <300 A has prompted a study of their properties when applied to diffraction gratings. In designing the coating, its interference order, usually the first order, must be paired with a suitable diffraction order of the grating. In addition a compromise must be made to reduce the incompatibility caused by the simple Bragg law performance of the grating with the corrected Bragg law performance of the coating.

© 1989 Optical Society of America

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