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Fabrication and characterization of two-dimensional phase-locked arrays of vertical-cavity surface-emitting lasers

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Abstract

Three different structures, e.g., 2×3 periodic array, hexagonal array, and concentric hexagonal array, of two-dimensional phase-locked array of vertical-cavity surface-emitting lasers have been fabricated by using oxygen implant isolation. The hexagonal array shows the largest threshold current, and the far-field beam pattern of concentric hexagonal array has the most circular beam pattern.

© 1990 Optical Society of America

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