Issues and methods of designing lenses for optical lithography

T. Tsuruta

doi:10.1364/OAM.1991.FB1

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Conferences > OAM > 1991 > FB > FB1

Optical Society of America Annual Meeting
Technical Digest Series (Optica Publishing Group, 1991),
paper FB1
•https://doi.org/10.1364/OAM.1991.FB1

Issues and methods of designing lenses for optical lithography

T. Tsuruta

Author Information

Author Affiliations

T. Tsuruta

Nikon Corp., 1-6-3 Nishi-Ohi, Shinagawa-ku, Tokyo, Japan

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T Tsuruta

OSA Annual Meeting 1991

San Jose, California United States
3–8 November 1991
ISBN:

From the session
Symposium on Current Developments in Optical and X-Ray Lithography (FB)

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T. Tsuruta, "Issues and methods of designing lenses for optical lithography," in Optical Society of America Annual Meeting, Technical Digest Series (Optica Publishing Group, 1991), paper FB1.

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OSA Annual Meeting 1991
San Jose, California United States
3–8 November 1991
ISBN:
From the session Symposium on Current Developments in Optical and X-Ray Lithography (FB)

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