Abstract
The design and operation of a VLSI electrically addressed spatial light modulator (SLM) with alignment photodetectors for optical processing is presented. The electrically addressed SLM consists of a 64 × 64 array of pixels located on 40-µm centers with addressing logic around the periphery of the array. The pixel array is surrounded by a guard ring structure to reduce previously observed1 light-induced effects such as chip latch-up and shortened pixel storage time. The modulator also utilizes optical detectors located at the corners of the array for ease of insertion into optical systems. The liquid crystal material used in the device is capable of switching in 0.75 ms at operating voltages of ±3.5 V. This allows device frame rates >1.3 kHz.
© 1991 Optical Society of America
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