Abstract

Several models of light scattering from a spherical particle on a flat surface have been proposed in the last five years.^1,2 We are studying this phenomenon experimentally to check the validity of the existing theories and to solve some technical problems in the semiconductor surface inspection applications. We have set up an optical system with a scanned laser beam. Polystyrene spherical particles with ~0.1-3.0 µm in diameter on different substrates have been studied. The comparisons of scattering matrices for conducting and dielectric surfaces have been made.

© 1991 Optical Society of America