Abstract
The coordinate error of a commercial coordinate measuring machine is measured as a vector by a target-tracking laser interferometric system, which was previously developed by us.1 The automatic target-tracking laser interferometer measures the radial distance between the rotation center of the tracking station and the comer point of a target mirror attached to a probing head of the CMM. The coordinate values of the CMM and the radial distance given by two tracking-interferometers are sampled simultaneously and the coordinate error at each sampled point is estimated through lease-squares criterion with an accuracy of 1 μm in a 1 m × i m plane. The possibility of using this tracking laser-interferometric system as a new coordinate measuring machine is discussed.
© 1991 Optical Society of America
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