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MOXTEK has been experimenting with reactive ion sputtering to achieve better quality multilayers. These experiments have been successful, achieving high reflectivities in the 8–60-Å region of the soft x-ray spectrum. These multilayers have been able to achieve >70% of their theoretical reflectivity. I present the results of x-ray, Auger, and atomic resolution TEM analysis of these multilayers.
© 1991 Optical Society of America
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