Theory and measurement of surface and bulk scattering in optical multilayers used as classical filters or waveguides

C. Amra; L. Bruel; F. Cleva

doi:10.1364/OAM.1991.TuF4

Optical Society of America Annual Meeting
Technical Digest Series (Optica Publishing Group, 1991),
paper TuF4
•https://doi.org/10.1364/OAM.1991.TuF4

Theory and measurement of surface and bulk scattering in optical multilayers used as classical filters or waveguides

C. Amra, L. Bruel, and F. Cleva

OSA Annual Meeting 1991

San Jose, California United States
3–8 November 1991
ISBN:

From the session
Optical Scattering from Surfaces and Thin Films (TuF)

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C. Amra, L. Bruel, and F. Cleva, "Theory and measurement of surface and bulk scattering in optical multilayers used as classical filters or waveguides," in Optical Society of America Annual Meeting, Technical Digest Series (Optica Publishing Group, 1991), paper TuF4.

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Abstract

Last year we showed how to separate substrate effects from all other effects in a study of light scattering from optical multilayers. In particular, we gave the residual roughness values for different materials obtained by IAD and IP processes. These values explain the additional scattering characteristic of the materials and are not due to reproduction of substrate defects.

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