Abstract

Graded-index coatings of silicon oxynitride have been deposited using ion assisted deposition. Discrete and graded-index coatings have been deposited by evaporation of silicon and bombardment with a mixture of nitrogen and oxygen ions. Optical properties of coatings have been examined using a dual beam spectrophotometer and variable angle spectroscopic ellipsometry (VASE). Results of discrete-index measurement indicates that silicon oxynitride coatings have good optical properties over the spectral range of 350–800 nm. Good agreement between results and the mixing theory have also been demonstrated over the index of refraction range between 1.5 and 2. Graded-index AR coatings have also been examined using VASE. Effects of the different models on the results have been examined.

© 1991 Optical Society of America