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Conferences > OAM > 1991 > WC > WC2

Surface properties of ion beam milled fused silica

S. R. Wilson, C. F. Kranenberg, D. W. Reicher, J. R. McNeil, P. L. White, D. E. McCready, and P. Martin

Open Access Open Access

Abstract

Results from a matrix study of the effects of fabrication technique (and attending subsurface damage) on the properties of ion beam milled fused silica surfaces are presented. Measured properties include surface and subsurface scatter, surface absorption, and laser damage threshold. Correlations between subsurface damage induced during fabrication and notable surface properties are identified. A figure of merit is used to identify the fabrication techniques best suited for use with ion beam milling and figuring.

© 1991 Optical Society of America

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