Effects of polishing compound chemistry on surface quality

A. A. Tesar; B. A. Fuchs; P. P. Hed

doi:10.1364/OAM.1991.WC4

Optical Society of America Annual Meeting
Technical Digest Series (Optica Publishing Group, 1991),
paper WC4
•https://doi.org/10.1364/OAM.1991.WC4

Effects of polishing compound chemistry on surface quality

A. A. Tesar, B. A. Fuchs, and P. P. Hed

OSA Annual Meeting 1991

San Jose, California United States
3–8 November 1991
ISBN:

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Optical Fabrication (WC)

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A. A. Tesar, B. A. Fuchs, and P. P. Hed, "Effects of polishing compound chemistry on surface quality," in Optical Society of America Annual Meeting, Technical Digest Series (Optica Publishing Group, 1991), paper WC4.

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Abstract

Results of the characterization of fused silica and zerodur surfaces polished by different compounds are presented. The polishing experiments used controlled parameters and pitch lap on a small planetary machine.

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