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Two-mirror reflecting microscope for soft x-ray uses

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Abstract

During the past several years, we have analyzed many aspects of spherical and aspherical two-mirror soft x-ray microscopes. These results are summarized and used to project the performance capabilities of a multilayer two-mirror microscope operating within the water window. As a result of the technological developments associated with NASA soft x-ray solar physics projects that have used one- and two-mirror telescopes operating at various wavelengths from 4.4 nm to 33.5 nm, a project has been initiated to fabricate and test a two-mirror microscope initially operating at 13 nm and then, after some developmental work, within the water window where an ultimate spatial resolution of <10 nm seems possible.

© 1991 Optical Society of America

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