Abstract

Scattering of airborne particulates has been observed at 0.442 μm and 0.633 μm. The observations were compared to Rayleigh scattering theory with excellent agreement. The angular scatter patterns of these particulates were measured with a p-polarized and an s-polarized incident beam. The detector polarization was the same as that of the incident beam as the detector was scanned in angle. The fourth power wavelength scaling law of Rayleigh particles was compared to the measured particulate scatter. The average index of refraction and particle diameters are calculated for these particles. The scatter from these particulates is a noise source that limits the sensitivity of optical scatterometers at specific angles of operation.

© 1992 Optical Society of America