Abstract

A numerical technique to calculate images of optically thick one-dimensional objects in scanning optical microscopy is described. Two kinds of samples are considered: In one case, the sample consists of a semi-infinite material characterized by its profile and complex refractive index. In the other case, the semi-infinite material is coated with a layer of a different material. The technique employed to calculate the scattered field is based on Green’s integral theorem. Since the boundary conditions are calculated rather than postulated, this technique is considered rigorous. Calculated images of several samples of conducting and dielectric materials in various modes of image formation will be presented.

© 1992 Optical Society of America