Three-dimensional x-ray microscopy with sub-micron depth resolution

Ian McNulty

doi:10.1364/OAM.1993.FBB.5

OSA Annual Meeting
Technical Digest Series (Optica Publishing Group, 1993),
paper FBB.5
•https://doi.org/10.1364/OAM.1993.FBB.5

Three-dimensional x-ray microscopy with sub-micron depth resolution

Ian McNulty

OSA Annual Meeting 1993

Toronto Canada
3–8 October 1993
ISBN:

From the session
Symposium on X-Ray Spectromicroscopy (FBB)

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I. McNulty, "Three-dimensional x-ray microscopy with sub-micron depth resolution," in OSA Annual Meeting, Technical Digest Series (Optica Publishing Group, 1993), paper FBB.5.

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Abstract

Three-dimensional x-ray imaging with a depth resolution that significantly exceeds that limited by the numerical aperture of the optics used can be achieved by applying tomographic methods to conventional x-ray microscopy.

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