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Conferences > OAM > 1993 > MV > MV.7

Electromagnetic inverse-scattering analysis of diffraction gratings

S. Sohail, H. Naqvi, B. Minhas, Richard Krukar, and R. Leland

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Abstract

Scatterometry, which is the angle resolved measurement of scattered light, is finding increasing usage in the metrology of semiconductor structures.

© 1993 Optical Society of America

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