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Conferences > OAM > 1993 > MYY > MYY.8

Precision optical testing of a soft-x-ray camera at λ = 14 nm

B. La Fontaine, O. R. Wood, A. A. MacDowell, D. L. White, Z. Tan, J. E. Bjorkholm, M. D. Himel, and D. M. Tennant

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Abstract

One of the major challenges facing the soft x-ray projection lithography program is realizing high resolution, diffraction limited imaging. Even though near diffraction-limited images were obtained with two different x-ray cameras, at λ = 14 nm 1 and at λ = 42 nm 2, a quantitative characterization of the imaging capabilities of these systems is still lacking.

© 1993 Optical Society of America

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