Open Access
Add to BibSonomyAbstract
Precise temperature measurements are critical for process control in a wide variety of materials. For semiconductor manufacturing, temperature control is required for processes such as oxidation, diffusion epitaxial growth, etc.
© 1993 Optical Society of America
PDF ArticleMore Like This
Moiré interferometric techniques for lithography and alignment
Saleem H. Zaidi, Ashwani K. Sharma, and S. R. J. Brueck
MYY.6 OSA Annual Meeting (FIO) 1993
Low-Temperature MBE Growth of IΠ-V Materials on Si Substrates
Michael Y. Frankel, Thomas F. Carruthers, and Bijan Tadayon
G3 Ultrafast Electronics and Optoelectronics (UEO) 1993
A Whitelight Interferometric Technique For Monitoring Temperature
P.T. Singh, J.W. Spencer, G. Li, J.E. Humphries, G.R. Jones, J.L. Dancaster, R. Pinnock, E. Dean, and J. Simpson
We343 Optical Fiber Sensors (OFS) 1996