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Mach-Zehnder interferometer in integrated optics on glass for chemical sensors

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Abstract

An integrated Mach-Zehnder interferometer is designed and fabricated in ordinary glass substrate: optical waveguides monomode at the wavelength of 0.78 μm are made in B270 glass, by ionic exchange in pure potassium nitrate molten salt at a temperature of 440 °C during 20 minutes, through a 2.5 μm large window in an aluminum thin film made by the standard lithographic process of microelectronics.

© 1993 Optical Society of America

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