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Demonstration of new methods for the design of asymmetric optical systems

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Abstract

Methods for the layout of asymmetric systems have been recently developed.1,2 These methods provide a framework for constraining the configuration of an asymmetric system to ensure that the system possesses a prescribed set of low-order imaging properties. Such a procedure can significantly reduce the dimensionality of the configuration space, and there is a commensurate simplification in the process of determining good starting configurations. To illustrate the effectiveness of these methods, they have been applied to a relatively simple (yet far from trivial) problem in lens design. Specifically, the class of systems comprised of two conic mirrors have been studied in order to determine the best such system for soft X-ray projection lithography. The results of this investigation are reported.

© 1993 Optical Society of America

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