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Image-scanning ellipsometry for the measurement of thin-film thickness profiles

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Abstract

A novel technique to measure the two-dimensional thickness profile of a nonuniform, thin, film from several nm up to several μm, in a steady or transient state has been developed and tested. Image Scanning Ellipsometry (ISE) is a full-field, imaging technique that can study every point on a surface simultaneously with high spatial resolution and thickness sensitivity; it can measure and map a 2-D film thickness profile.

© 1993 Optical Society of America

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