Abstract
A novel technique to measure the two-dimensional thickness profile of a nonuniform, thin, film from several nm up to several μm, in a steady or transient state has been developed and tested. Image Scanning Ellipsometry (ISE) is a full-field, imaging technique that can study every point on a surface simultaneously with high spatial resolution and thickness sensitivity; it can measure and map a 2-D film thickness profile.
© 1993 Optical Society of America
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