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Multilayer modal method for diffraction gratings of arbitrary profile, depth, and permittivity

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Abstract

It is well known that a diffraction grating of arbitrary profile can be approximated by a stack of lamellar (rectangular groove) gratings, and that the diffraction of light by the arbitrary-profile grating can be modeled by the modal method1 that is specifically formulated to model lamellar gratings.

© 1993 Optical Society of America

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