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Conferences > OAM > 1993 > WPP > WPP.1

Spectroscopic ellipsometry measurements of the optical functions of thin films

G. E. Jellison, L. A. Boatner, D. H. Lowndes, R. A. McKee, and M. Godbole

Open Access Open Access

Abstract

A procedure has been developed to determine the optical functions of thin films from spectroscopic ellipsometry data.

© 1993 Optical Society of America

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