Abstract
A focusing waveguide grating coupler was designed and fabricated for the application of a small size optical probe head. The grating coupler was formed on a single mode silicate glass waveguiding layer by using e-beam lithography and the coupling area was 1×1mm2 with 1,000 grating lines. The maximum and minimum spacing of the grating lines were 0.28 □ and 0.15 □, respectively. The focal length and the numerical aperture of the present grating coupler were 530nm and 0.92 for 632.8nm He-Ne red laser. The diameter of the final spot was measured to be 450 nm and 510 nm in x and y direction.
© 2003 Optical Society of America
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