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Conferences > OECC_PS > 2013 > MM1 > MM1_2
  • 2013 18th OptoElectronics and Communications Conference held jointly with 2013 International Conference on Photonics in Switching
  • (Optica Publishing Group, 2013),
  • paper MM1_2
  • •https://doi.org/10.1364/OECC_PS.2013.MM1_2

SOI-based Monolithic Integration of MOSFET with Thermo-optic Mach-Zehnder Switch towards Driver-on-chip Circuit Switches

G. W. Cong, T. Matsukawa, T. Chiba, H. Tadokoro, M. Yanagihara, M. Ohno, H. Kawashima, H. Kuwatsuka, Y. Igarashi, M. Masahara, and H. Ishikawa

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Abstract

We demonstrate the monolithic integration of MOSFETs with thermo-optic (TO) Mach-Zehnder switches on SOI platforms. Successful driving operation was achieved for the TO switch via MOSFETs, which is promising for realizing driver-on-chip large-scale circuit switches.

© 2013 IEICE

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