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Optica Publishing Group
  • 2013 18th OptoElectronics and Communications Conference held jointly with 2013 International Conference on Photonics in Switching
  • (Optica Publishing Group, 2013),
  • paper TuPS_13
  • https://doi.org/10.1364/OECC_PS.2013.TuPS_13

Polymer-Based Waveguide Optical Sensor with Tin Oxide Thin Film for Gas Detection

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Abstract

We proposed optical sensor based on polymer waveguide with tin oxide thin film on the top of core layer exposed by removing upper cladding layer. This device was fabricated by the nano imprint lithography technique.

© 2013 IEICE

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