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Ultra-fast Laser Induced Morphology and Structure of Ge2Sb2Te5 Phase Change Materials

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Abstract

The phase-change behavior of amorphous Ge2Sb2Te5 (GST) films induced by picosecond pulsed laser was investigated. By controlling the film thickness, laser fluence and substrate type, GST exhibited obviously different morphology and structure.

© 2018 The Author(s)

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