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Reaction equilibrium and resultant glass compositions in the MCVD process

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Abstract

Previous spectrophotometric studies1,2 of the MCVD process have shown that above 1700 K, SiCl4 is completely oxidized, compared with as little as 20% of the GeCl4 This was shown to be due to the unfavorable equilibrium.

© 1982 Optical Society of America

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