Abstract
A combination of flame hydrolysis glass deposition and reactive ion etching has enabled the fabrication of fiber-compatible high-silica channel optical waveguides on silicon substrates.1 In many single-mode applications–optical interference systems, for example–birefringence characteristics of waveguides are the crucial factors affecting the stability and sensitivity of the system. This paper describes birefringence value control in high-silica single-mode channel waveguides in fabrication of a polarization-insensitive guided-wave Mach-Zehnder interferometer as an optical-frequency-division multi/ demultiplexer.2,3
© 1987 Optical Society of America
PDF ArticleMore Like This
S. Garcia Bianco, J.S. Aitchison, J.M. Cooper, and R.M. De La Rue
IFG5 Integrated Photonics Research (IPR) 2002
Katsunari Okamoto
ThE1 Integrated Photonics Research (IPR) 1991
Masao Kawachi, Morio Kobayashi, and Tadashi Miyashita
FDD5 Integrated and Guided Wave Optics (IGWO) 1986