Integrated-optic modulators are crucial components for many high- performance lightwave communication systems. Semiconductor waveguide modulators offer the potential for monolithic integration with electronic circuitry, permitting a reduction in external drive power resulting from on-chip amplifier gain,1 increased interconnection reliability, and decreased size, weight, and parasitic reactance. Because electronic and photonic devices generally have different material requirements and fabrication procedures, previous attempts to demonstrate a waveguide modulator with integrated drive electronics have produced devices with high optical loss or low electrooptic efficiency.1-3

© 1992 Optical Society of America

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