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  • Optical Fiber Communication Conference and the International Conference on Integrated Optics and Optical Fiber Communication
  • OSA Technical Digest Series (Optica Publishing Group, 1999),
  • paper TuG

Tutorial on Silicon Micromachines for Lightwave Networks

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Abstract

Silicon micromechanics is a technology which we believe has the potential to radically alter the landscape of lightwave networks and systems. Silicon micromachines are devices that are built like an IC, using many of the same processes and techniques.

© 1999 Optical Society of America

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