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  • Optical Fiber Communication Conference
  • Technical Digest (Optica Publishing Group, 2003),
  • paper TuN1

A Surface and Bulk Micromachined Angular Vertical Combdrive for Scanning Micromirrors

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We present a high performance scanning micro-mirror with angular vertical comb actuators realized by combining MUMPs with a 3-mask deep-reactive-ion-etching post process. A DC scan angle of ±4° (mechanical) is achieved at 40V.

© 2003 Optical Society of America

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