A complete internal mechanical stress analysis of multilayer composite leads to optimized coating process control for 50GHz thin film filters

J. J. Pan; Joy Jiang; Feng Qing Zhou; James Guo

Optical Fiber Communication Conference
Technical Digest (CD) (Optica Publishing Group, 2004),
paper MF30

A complete internal mechanical stress analysis of multilayer composite leads to optimized coating process control for 50GHz thin film filters

J. J. Pan, Joy Jiang, Feng Qing Zhou, and James Guo

Optical Fiber Communication Conference 2004

Los Angeles, California United States
ISBN: 1-55752-767-9

From the session
Poster Session (MF)

Not Accessible

Your library or personal account may give you access

Get PDF
Email
Share
Get Citation
Copy Citation Text
J. J. Pan, J. Jiang, F. Q. Zhou, and J. Guo, "A complete internal mechanical stress analysis of multilayer composite leads to optimized coating process control for 50GHz thin film filters," in Optical Fiber Communication Conference, Technical Digest (CD) (Optica Publishing Group, 2004), paper MF30.

Export Citation
- BibTex
- Endnote (RIS)
- HTML
- Plain Text
Save article

Abstract

Internal stress simulation of a multilayer structure using measured wafer curvature accurately predicts the central wavelength shifts and spectrum ripple resulting from grinding and temperature change, thereby greatly improving the production yield of 50GHz filters.

PDF Article

More Like This

Ultra-low Stress Thin Film Interference Filters

Georg J. Ockenfuss and Robert E. Klinger
ThE2 Optical Interference Coatings (OIC) 2004

Stress, microstructure and thermal-elastic properties of evaporated thin MgF2 – films

R. Thielsch, J. Heber, T. Feigl, and N. Kaiser
ThE6 Optical Interference Coatings (OIC) 2004

Multilayer thin-film coatings for optical communication systems

Martina Gerken and David A. B. Miller
ThD2 Optical Interference Coatings (OIC) 2004

Previous Article Next Article