Fatigue characteristics of Si movable comb inserted into MEMS optical devices

Takayuki Shimazu; Kei Sunaga; Makoto Katayama

Optical Fiber Communication Conference
Technical Digest (CD) (Optica Publishing Group, 2004),
paper MF37

Fatigue characteristics of Si movable comb inserted into MEMS optical devices

Takayuki Shimazu, Kei Sunaga, and Makoto Katayama

Optical Fiber Communication Conference 2004

Los Angeles, California United States
ISBN: 1-55752-767-9

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Poster Session (MF)

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T. Shimazu, K. Sunaga, and M. Katayama, "Fatigue characteristics of Si movable comb inserted into MEMS optical devices," in Optical Fiber Communication Conference, Technical Digest (CD) (Optica Publishing Group, 2004), paper MF37.

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Abstract

Fatigue life for the moving part had been inspected at the real operation condition for the first time. The obtained fracture rate was about 03 indicated the MEMS devices were reliable enough for practical usage.

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