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  • Optical Fiber Communication Conference
  • Technical Digest (CD) (Optica Publishing Group, 2004),
  • paper PD15

A gigahertz silicon-on-insulator Mach-Zehnder modulator

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Abstract

We report a modulator in which a polysilicon-oxide-silicon capacitor forms a ridge waveguide to achieve unprecedented performance in silicon: 2.5GHz small-signal bandwidth and a driver-limited extinction ratio of 5dB at 1 gigabit per second.

© 2004 Optical Society of America

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