Helium Implanted Silicon Waveguide Photodetectors for Optical Power Monitors

Y. Liu; C. W. Chow; W. Y. Cheung; H. K. Tsang

Optical Fiber Communication Conference and Exposition and The National Fiber Optic Engineers Conference
Technical Digest (CD) (Optica Publishing Group, 2006),
paper OWI78

Helium Implanted Silicon Waveguide Photodetectors for Optical Power Monitors

Y. Liu, C. W. Chow, W. Y. Cheung, and H. K. Tsang

Optical Fiber Communication Conference 2006

Anaheim, California United States
5–10 March 2006
ISBN: 1-55752-802-0

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OFC Poster Session (OWI)

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Y. Liu, C. W. Chow, W. Y. Cheung, and H. K. Tsang, "Helium Implanted Silicon Waveguide Photodetectors for Optical Power Monitors," in Optical Fiber Communication Conference and Exposition and The National Fiber Optic Engineers Conference, Technical Digest (CD) (Optica Publishing Group, 2006), paper OWI78.

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Abstract

The enhanced photo-response of helium ion implanted silicon waveguides as a function of different anneal temperatures and durations is reported. The enhancement in responsivity at communication wavelength was sufficient for use as optical power monitors.

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